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1

Fabrication Method of Micromachined Quartz Glass Resonator Using Sacrificial Supporting Structures

Khan, Muhammad Jehanzeb, Tsukamoto, Takashiro, Al Farisi, Muhammad Salman, Tanaka, Shuji

Journal:

Sensors and Actuators A: Physical

Year:

2020

File:

PDF, 6.30 MB

2020

2

[IEEE 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Hiroshima, Japan (2020.3.23-2020.3.26)] 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Triple Mass Resonator with High Capacity to Tune Frequency and Quality Factor

Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji

Year:

2020

File:

PDF, 1.20 MB

2020

3

Stylus type MEMS texture sensor covered with corrugated diaphragm

Tsukamoto, Takashiro, Asao, Hideaki, Tanaka, Shuji

Journal:

Journal of Micromechanics and Microengineering

Year:

2017

Language:

english

File:

PDF, 4.61 MB

english, 2017

4

Fully Differential Single Resonator FM Gyroscope Using CW/CCW Mode Separator

Tsukamoto, Takashiro, Tanaka, Shuji

Journal:

Journal of Microelectromechanical Systems

Year:

2018

Language:

english

File:

PDF, 3.12 MB

english, 2018

5

[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Automated Frequency and Quality Factor Mismatch Compensation Method for MEMS Rate Integrating Gyroscope

Tsukamoto, Takashiro, Tanaka, Shuji

Year:

2019

Language:

english

File:

PDF, 1.17 MB

english, 2019

6

[IEEE 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Moltrasio (2018.3.26-2018.3.29)] 2018 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Virtually rotated MEMS whole angle gyroscope using independently controlled CW/CCW oscillations

Tsukamoto, Takashiro, Tanaka, Shuji

Year:

2018

Language:

english

File:

PDF, 476 KB

english, 2018

7

[IEEE 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Naples, FL, USA (2019.4.1-2019.4.5)] 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - MEMS Rate Integrating Gyroscope with Temperature Corrected Virtual Rotation

Tsukamoto, Takashiro, Tanaka, Shuji

Year:

2019

Language:

english

File:

PDF, 905 KB

english, 2019

8

Infrared thermal detector array using Eu(TTA) 3 -based temperature sensitive paint for optical readable thermal imaging device

Wang, Min, Tsukamoto, Takashiro, Tanaka, Shuji

Journal:

Journal of Micromechanics and Microengineering

Year:

2015

Language:

english

File:

PDF, 1.96 MB

english, 2015

9

On-chip electrochromic micro display for a disposable bio-sensor chip

Zhu, Yanjun, Tsukamoto, Takashiro, Tanaka, Shuji

Journal:

Journal of Micromechanics and Microengineering

Year:

2017

Language:

english

File:

PDF, 4.18 MB

english, 2017

10

Magnetocaloric cooling of a thermally-isolated microstructure

Tsukamoto, Takashiro, Esashi, Masayoshi, Tanaka, Shuji

Journal:

Journal of Micromechanics and Microengineering

Year:

2012

Language:

english

File:

PDF, 459 KB

english, 2012

11

[IEEE 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Hiroshima, Japan (2020.3.23-2020.3.26)] 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Quality Factor Trimming Method Using Thermoelastic Dissipation for Ring-Shape MEMS Resonator

Hamza, Abdelli, Tsukamoto, Takashiro, Tanaka, Shuji

Year:

2020

File:

PDF, 4.03 MB

2020

12

[IEEE 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Hiroshima, Japan (2020.3.23-2020.3.26)] 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Fabrication Technology of Quartz Glass Resonator Using Sacrificial Metal Support Structure

Khan, Muhammad Jehanzeb, Tsukamoto, Takashiro, Tanaka, Shuji

Year:

2020

File:

PDF, 2.23 MB

2020

13

[IEEE 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Hiroshima, Japan (2020.3.23-2020.3.26)] 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Roll/Pitch Rate Integrating MEMS Gyroscope Using Dynamically Balanced Dual-Mass Resonator

Wang, Shihe, Al Farisi, Muhammad Salman, Tsukamoto, Takashiro, Tanaka, Shuji

Year:

2020

File:

PDF, 2.01 MB

2020

14

Carbon-Nanotube-Enhanced Thermal Contactor in Low Contact Pressure Region

Tsukamoto, Takashiro, Esashi, Masayoshi, Tanaka, Shuji

Journal:

Japanese Journal of Applied Physics

Year:

2010

Language:

english

File:

PDF, 388 KB

english, 2010

15

[IEEE 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Kauai, HI, USA (2017.3.27-2017.3.30)] 2017 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator

Tsukamoto, Takashiro, Tanaka, Shuji

Year:

2017

Language:

english

File:

PDF, 969 KB

english, 2017

16

Automated frequency and quality‐factor matching method for frequency modulated / rate integrating gyroscope

Tsukamoto, Takashiro, Tanaka, Shuji

Journal:

Electrical Engineering in Japan

Year:

2019

Language:

english

File:

PDF, 2.37 MB

english, 2019

17

Uncooled infrared thermal imaging sensor using vacuum-evaporated europium phosphor

Wang, Min, Tsukamoto, Takashiro, Tanaka, Shuji

Journal:

Journal of Micromechanics and Microengineering

Year:

2015

Language:

english

File:

PDF, 1.38 MB

english, 2015

18

Thermal Imaging Device using Infrared-to-Visible Converter Made of Temperature Sensitive Phosphor

Tsukamoto, Takashiro, Wang, Min, Tanaka, Shuji

Journal:

Journal of Photopolymer Science and Technology

Year:

2016

Language:

english

File:

PDF, 2.31 MB

english, 2016

19

[IEEE 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Los Angeles, CA, USA (2017.4.9-2017.4.12)] 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - System development of biosensing module using CMOS hall sensor array for disposable wireless diagnosis device

Sun, Tong, Tsukamoto, Takashiro, Ishikawa, Tomohiro, Tanaka, Shuji

Year:

2017

Language:

english

File:

PDF, 989 KB

english, 2017

20

A micro thermal switch with a stiffness-enhanced thermal isolation structure

Tsukamoto, Takashiro, Esashi, Masayoshi, Tanaka, Shuji

Journal:

Journal of Micromechanics and Microengineering

Year:

2011

Language:

english

File:

PDF, 972 KB

english, 2011

21

Tailoring material properties of electrochemically deposited Al film from chloroaluminate ionic liquid for microsystem technology using pulsed deposition

Al Farisi, Muhammad Salman, Tsukamoto, Takashiro, Tanaka, Shuji

Journal:

Sensors and Actuators A: Physical

Year:

2020

File:

PDF, 3.01 MB

2020

22

High spatial, temporal and temperature resolution thermal imaging method using Eu(TTA) 3 temperature sensitive paint

Tsukamoto, Takashiro, Esashi, Masayoshi, Tanaka, Shuji

Journal:

Journal of Micromechanics and Microengineering

Year:

2013

Language:

english

File:

PDF, 2.52 MB

english, 2013

23

Micro thermal diode with glass thermal insulation structure embedded in a vapor chamber

Tsukamoto, Takashiro, Hirayanagi, Takashi, Tanaka, Shuji

Journal:

Journal of Micromechanics and Microengineering

Year:

2017

Language:

english

File:

PDF, 2.97 MB

english, 2017

24

[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Aptamer-Based Allergen Sensing System for Food Safety

Abdelli, Hamza, Tsukamoto, Takashiro, Ito, Takahiro, Inoue, Kumi Y., Matsue, Tomokazu, Tanaka, Shuji

Year:

2019

Language:

english

File:

PDF, 1.82 MB

english, 2019

25

Laterally vibrating MEMS resonant vacuum sensor based on cavity-SOI process for evaluation of wide range of sealed cavity pressure

Liu, Cong, Froemel, Joerg, Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji

Journal:

Microsystem Technologies

Year:

2018

Language:

english

File:

PDF, 1.82 MB

english, 2018

26

[IEEE 2014 29th Symposium on Microelectronics Technology and Devices (SBMicro) - Aracaju, Brazil (2014.9.1-2014.9.5)] 2014 29th Symposium on Microelectronics Technology and Devices (SBMicro) - De sign of a dual lens of a dual lens system for a micromachined system for a micromachined system for a micromachined system for a micromachined system for a micromachined system for a micromachined system for a micromachined system for a micromachined system for a micromachined optical setup optical setup optical setup

Moura, Thiago D. O., Tsukamoto, Takashiro, Tanaka, Shuji, Filgueiras, Daniel, de Lima Monteiro, Davies W.

Year:

2014

Language:

english

File:

PDF, 1.36 MB

english, 2014

27

Printable on-chip micro battery for disposal bio-sensing device

Tsukamoto, Takashiro, Tanaka, Shuji

Journal:

Journal of Physics Conference Series

Year:

2015

Language:

english

File:

PDF, 1.65 MB

english, 2015

28

[IEEE 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) - Sendai, Japan (2016.8.22-2016.8.25)] 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) - Disposable wireless bio-sensor for daily health examination system

Tsukamoto, Takashiro, Zhu, Yanjun, Tanaka, Shuji

Year:

2016

Language:

english

File:

PDF, 340 KB

english, 2016

29

[IEEE 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Naples, FL, USA (2019.4.1-2019.4.5)] 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam

Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji

Year:

2019

Language:

english

File:

PDF, 1015 KB

english, 2019

30

[IEEE 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Naples, FL, USA (2019.4.1-2019.4.5)] 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Quad Mass Gyroscope with 16 ppm Frequency Mismatch Trimmed by Focus Ion Beam

Chen, Jianlin, Tsukamoto, Takashiro, Tanaka, Shuji

Year:

2019

File:

PDF, 1015 KB

2019

31

Piezoelectric Moonie-type Resonant Microactuator

FUJIMURA, YASUHIRO, TSUKAMOTO, TAKASHIRO, TANAKA, SHUJI

Journal:

Electronics and Communications in Japan

Year:

2018

Language:

english

File:

PDF, 1.26 MB

english, 2018

32

Basic study on heat rejection system using high heat flux micro channel evaporator

Ryoji Imai, Takashiro Tsukamoto

Journal:

Microgravity Science and Technology

Year:

2007

Language:

english

File:

PDF, 523 KB

english, 2007

33

A novel multiple-axis MEMS gyroscope-accelerometer with decoupling frames

Baranov, Pavel, Nesterenko, Tamara, Barbin, Evgenii, Koleda, Aleksej, Tanaka, Shuji, Tsukamoto, Takashiro, Kulinich, Ivan, Zykov, Dmitry, Shelupanov, Alexander

Journal:

Year:

2019

Language:

english

File:

PDF, 850 KB

english, 2019

34

Thermal characteristics of a high heat flux micro-evaporator

Takashiro Tsukamoto, Ryoji Imai

Journal:

Experimental Thermal and Fluid Science

Year:

2006

Language:

english

File:

PDF, 596 KB

english, 2006

35

[IEEE 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - Naples, FL, USA (2019.4.1-2019.4.5)] 2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) - MEMS Rate Integrating Gyroscope with Temperature Corrected Virtual Rotation

Tsukamoto, Takashiro, Tanaka, Shuji

Year:

2019

File:

PDF, 905 KB

2019

36

Printable on-chip micro battery

Tsukamoto, Takashiro, Tanaka, Shuji

Journal:

IEEJ Transactions on Electrical and Electronic Engineering

Year:

2019

Language:

english

File:

PDF, 1.15 MB

english, 2019

37

[IEEE 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Berlin, Germany (2019.6.23-2019.6.27)] 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) - Aptamer-Based Allergen Sensing System for Food Safety

Abdelli, Hamza, Tsukamoto, Takashiro, Ito, Takahiro, Inoue, Kumi Y., Matsue, Tomokazu, Tanaka, Shuji

Year:

2019

File:

PDF, 1.82 MB

2019

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